آلة التنظيف بالبلازما الفراغية SPV-60
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آلة التنظيف بالبلازما الفراغية SPV-60
Outline:
Vacuum Plasma Cleaner(منظف البلازما),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, حماية البيئة, efficient and stable surface treatment.
آلة التنظيف بالبلازما الفراغية SPV-60
صroduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
آلة التنظيف بالبلازما الفراغية SPV-60
أناndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.صناعة ثنائي الفينيل متعدد الكلور/FPC: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.صناعة أشباه الموصلات: semiconductor packaging, وحدة الكاميرا, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: التعبئة والتغليف, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
آلة التنظيف بالبلازما الفراغية SPV-60
تechnical specifications
Power System
| Radio-frequency power supply | Medium-frequency power supply | |
قوة | 0~600W | 0~1000W | |
تكرار | 13.56ميغاهيرتز | 40كيلوهرتز | |
Vacuum system
| Two-stage rotary vane pump (oil pump) | 40m3/h | |
Vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
مادة | Aluminum alloy (customizable stainless steel chamber) | ||
سماكة | 25مم | ||
Leakproofness | Military grade welding seal | ||
Internal dimension of cavity | 375×375×430mm(W×H×D) | ||
Effective size of electrode plate | 345×344mm(W×D) | ||
Available space spacing | 22.5مم | ||
Electrode plate layout | Horizontal layout, movable extraction | ||
Work tray | Standard set, material optional (الألومنيوم, wire mesh) | ||
Work space | 6 layers | ||
Gas system
| Flow range | 0~300SCCM | |
Process gas gas circuit | Standard with two channels, can be customized | ||
نظام التحكم | System control | PLC | |
Delivery method | 7 شاشة تعمل باللمس بوصة | ||
Other Parameter
| Boundary dimension | 900×1600×900mm(宽×高×深) | |
وزن | 150كلغ | ||
Device appearance color | silver gray |
Factory specification requirements
Factory specification requirements | |
Ac power specifications | مزود الطاقة:AC380V,50/60هرتز,5 خطوط,50أ |
عادم المصنع | تدفق:2.0 م³/دقيقة |
Gas requirements for factory work | تدفق:1~10 L/min ضغط:3~7 كجم/سم² Pipe diameter:6×4 mm مادة: أنبوب بو نقاء: فوق 99.99% |
متطلبات الهواء المضغوط للمصنع | تدفق:1~10 L/min ضغط:3~7 كجم/سم² Pipe diameter:8×5 mm مادة: أنبوب بو Dew point: below -40℃ الجسيمات> 0.3 ميكرومتر:10قطعة/قدم³ |
جonfiguration list
configuration list | |||||
لا | اسم | وصف | وحدة | الكمية | |
1 | يستضيف | Boundary dimension:900×1600×900mm(W×H×D) | Pc | 1 | |
2 | Vacuum chamber | Aluminum alloy vacuum chamber Inside dimension375×375×430mm(W×H×D) | Pc | 1 | |
3 | Excitation power supply | Radio-frequency power supply | Medium-frequency power supply | تعيين | 1 |
تكرار:13.56ميغاهيرتز; قوة :0~600W Automatic vacuum capacitor matcher | تكرار:40كيلوهرتز; 0~1000W;
| ||||
4 | PLC | سيمنز,S7-200 | Pc | 1 | |
5 | شاشة اللمس | Vellon, 7 inch screen, MT6071iE | Pc | 1 | |
6 | Flowmeter | British Wawick brand | Pc | 2 | |
7 | مضخة فراغ | Flyover two-stage rotary vane pump (oil pump) : 40m3/h | Pc | 1 | |
8 | Vacuum gauge | INFICON
| Pc | 1 | |
9 | يدوي
| Operation manual of vacuum plasma cleaner SPV-60 | Pc | 1 |
Optional table
Optional table | ||
Excitation power supply | Radio-frequency power supply | Medium-frequency power supply |
Custom power: تكرار:13.56ميغاهيرتز; قوة:0~1000W; Custom automatic vacuum capacitor matching machine | تكرار:40كيلوهرتز,قوة:2000دبليو
| |
CERES power supply: frequency 13.56MHz; قوة:0~600W or 0~1000W Optional ; American CERES automatic vacuum capacitor matcher | ||
مضخة فراغ | Germany Leibao double-stage rotary vane pump (oil pump):40m3/h | |
Flyover two-stage rotary vane pump (oil pump) :40m3/h |