وصف

آلة التنظيف بالبلازما الفراغية SPV-60

Outline:

Vacuum Plasma Cleaner(منظف ​​البلازما),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, حماية البيئة, efficient and stable surface treatment.

آلة التنظيف بالبلازما الفراغية SPV-60

صroduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

آلة التنظيف بالبلازما الفراغية SPV-60

أناndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.صناعة ثنائي الفينيل متعدد الكلور/FPC: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.صناعة أشباه الموصلات: semiconductor packaging, وحدة الكاميرا, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: التعبئة والتغليف, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

آلة التنظيف بالبلازما الفراغية SPV-60

تechnical specifications

Power System

 

Radio-frequency power supplyMedium-frequency power supply
قوة0~600W0~1000W
تكرار13.56ميغاهيرتز40كيلوهرتز
Vacuum system

 

Two-stage rotary vane pump (oil pump)40m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
مادةAluminum alloy (customizable stainless steel chamber)
سماكة25مم
LeakproofnessMilitary grade welding seal
Internal dimension of cavity375×375×430mm(W×H×D)
Effective size of electrode plate345×344mm(W×D)
Available space spacing22.5مم
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (الألومنيوم, wire mesh)
Work space6 layers
Gas system

 

Flow range0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
نظام التحكمSystem controlPLC
Delivery method7 شاشة تعمل باللمس بوصة
Other Parameter

 

Boundary dimension900×1600×900mm(宽×高×深)
وزن150كلغ
Device appearance colorsilver gray


Factory specification requirements

Factory specification requirements
Ac power specificationsمزود الطاقة:AC380V,50/60هرتز,5 خطوط,50أ
عادم المصنعتدفق:2.0 م³/دقيقة
Gas requirements for factory workتدفق:1~10 L/min

ضغط:3~7 كجم/سم²

Pipe diameter:6×4 mm

مادة: أنبوب بو

نقاء: فوق 99.99%

متطلبات الهواء المضغوط للمصنعتدفق:1~10 L/min

ضغط:3~7 كجم/سم²

Pipe diameter:8×5 mm

مادة: أنبوب بو

Dew point: below -40℃

الجسيمات> 0.3 ميكرومتر:10قطعة/قدم³

جonfiguration list

configuration list
لااسموصفوحدةالكمية
1يستضيفBoundary dimension:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamber

Inside dimension375×375×430mm(W×H×D)

Pc1
3Excitation power supplyRadio-frequency power supplyMedium-frequency power supplyتعيين1
تكرار:13.56ميغاهيرتز;

قوة :0~600W

Automatic vacuum capacitor matcher

تكرار:40كيلوهرتز;

0~1000W;

 

4PLCسيمنز,S7-200Pc1
5شاشة اللمسVellon, 7 inch screen, MT6071iEPc1
6FlowmeterBritish Wawick brandPc2
7مضخة فراغFlyover two-stage rotary vane pump (oil pump) : 40m3/hPc1
8Vacuum gaugeINFICON

 

Pc1
9يدوي

 

Operation manual of vacuum plasma cleaner SPV-60Pc1

Optional table

Optional table
Excitation power supplyRadio-frequency power supplyMedium-frequency power supply
Custom power: تكرار:13.56ميغاهيرتز;

قوة:0~1000W

Custom automatic vacuum capacitor matching machine

تكرار:40كيلوهرتز,قوة:2000دبليو

 

CERES power supply: frequency 13.56MHz

قوة:0~600W or 0~1000W Optional

American CERES automatic vacuum capacitor matcher

مضخة فراغGermany Leibao double-stage rotary vane pump (oil pump):40m3/h
Flyover two-stage rotary vane pump (oil pump) :40m3/h






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