תיאור

בודק חספוס MMD-SV100,מנתח חספוס פני השטח

Principle of instrumental

The instrument is cartesian coordinate measuring method, stylus contact type. Axis X uses high-precision linear guide rail as the benchmark, axis Z1 uses digital sensor to map the coordinate points of the surface contour shape of the measured parts, and carries out mathematical operation and processing on the original data collected by the sensor through computer software to mark the required measurement items.

Measurement functions

Roughness analysis: Ra, Rq, Rz, Rp, Rt, Rsk, Rsm, Rc, Rz(מ), R3z, Rz(JIS), Rpmax

Rpm, Rku, Rdq/R△q, RδC, Mr1, Mr2, Rpk, Rvk, Rk, Rdc, A1, A2

Rx, AR, Rpc, Rmax, RZ-ISO, 4אחד, Ry

Ripple analysis: Wt, Wa, Wp, Wv, Wq, Wc, Wku, Wsk, W, Wx, Wz, Wsm, Wdc, Wte

Wmr, Aw, ג(Wmr), Wmr(ג), Wdq/W△q

Original contour analysis: Pt, אבא, Pp, Pv, Pq, PC, Pku, Psk, Pdq/ P-Q, Psm, Pdc, Pmr(ג), Pz

The Pmr, ג (Pmr)

בודק חספוס MMD-SV100,מנתח חספוס פני השטח

מפרט טכני

פריטמִפרָט
מדוד טווחX axis driver100מ"מ
Z1(sensor)

Roughness and contour sharing

15מ"מ
Column height400מ"מ
Measure accuracyX Axis

(L=X axis Moving guide distance)

±(0.8+0.2L/100)מיקרומטר
Z1 Axis

(H=Z1 axisd direction measure height)

±(0.8+|0.2ח|/100)מיקרומטר
salvage value contour≤0.005μm
Error value≤±(5nm+0.1A)
Indication repeatability≤±3%
ציר Xstraightness0.6μm /100mm
פתרון הבעיה0.01מיקרומטר
sensorסוּגGrating sensor
פתרון הבעיה0.01מיקרומטר
Evaluate lengthλc×3、4、5、6、7
Cutoff wavelength0.025、0.08、0.25、0.8、2.5、8מ"מ
Motion controlSpeed of rail movement0.02מ"מ–4.0מ"מ/שנייה
Measurement speed0.02מ"מ– 4.0מ"מ/שנייה






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