בודק חספוס MMD-SV100,מנתח חספוס פני השטח
- תיאור
- חֲקִירָה
תיאור
בודק חספוס MMD-SV100,מנתח חספוס פני השטח
Principle of instrumental
The instrument is cartesian coordinate measuring method, stylus contact type. Axis X uses high-precision linear guide rail as the benchmark, axis Z1 uses digital sensor to map the coordinate points of the surface contour shape of the measured parts, and carries out mathematical operation and processing on the original data collected by the sensor through computer software to mark the required measurement items.
Measurement functions
Roughness analysis: Ra, Rq, Rz, Rp, Rt, Rsk, Rsm, Rc, Rz(מ), R3z, Rz(JIS), Rpmax
Rpm, Rku, Rdq/R△q, RδC, Mr1, Mr2, Rpk, Rvk, Rk, Rdc, A1, A2
Rx, AR, Rpc, Rmax, RZ-ISO, 4אחד, Ry
Ripple analysis: Wt, Wa, Wp, Wv, Wq, Wc, Wku, Wsk, W, Wx, Wz, Wsm, Wdc, Wte
Wmr, Aw, ג(Wmr), Wmr(ג), Wdq/W△q
Original contour analysis: Pt, אבא, Pp, Pv, Pq, PC, Pku, Psk, Pdq/ P-Q, Psm, Pdc, Pmr(ג), Pz
The Pmr, ג (Pmr)
בודק חספוס MMD-SV100,מנתח חספוס פני השטח
מפרט טכני
פריט | מִפרָט | ||
מדוד טווח | X axis driver | 100מ"מ | |
Z1(sensor) Roughness and contour sharing | 15מ"מ | ||
Column height | 400מ"מ | ||
Measure accuracy | X Axis (L=X axis Moving guide distance) | ±(0.8+0.2L/100)מיקרומטר | |
Z1 Axis (H=Z1 axisd direction measure height) | ±(0.8+|0.2ח|/100)מיקרומטר | ||
salvage value contour | ≤0.005μm | ||
Error value | ≤±(5nm+0.1A) | ||
Indication repeatability | ≤±3% | ||
ציר X | straightness | 0.6μm /100mm | |
פתרון הבעיה | 0.01מיקרומטר | ||
sensor | סוּג | Grating sensor | |
פתרון הבעיה | 0.01מיקרומטר | ||
Evaluate length | λc×3、4、5、6、7 | ||
Cutoff wavelength | 0.025、0.08、0.25、0.8、2.5、8מ"מ | ||
Motion control | Speed of rail movement | 0.02מ"מ–4.0מ"מ/שנייה | |
Measurement speed | 0.02מ"מ– 4.0מ"מ/שנייה |