SPK-500S Wide Plasma Cleaning Machine



SPK-500S  Wide Plasma Cleaning Machine


SPK-500S Wide Plasma Cleaning Machine(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, environmental protection, efficient and stable surface treatment.

SPK-500S  Wide Plasma Cleaning Machine

Product feature:

1.A dielectric is placed between the metal electrodes, and a uniform electric field is formed and a plasma is generated by taking advantage of the polarization phenomenon on the surface of the dielectric.

2.It can form plasma on a large scale and can be used with automatic pipeline;

3.More reliable power amplifier and dc module, using automatic vacuum capacitor matcher to provide long-term stable process time guarantee;

4.Suitable for mass production of large size products;

5.Low treatment temperature, conventional treatment temperature < 40℃.

Industry application:

1.Display industry: TP fitting, panel surface activation, surface cleaning before ITO coating;

2.Glass cover industry: AF coating pretreatment, AF/AS overflow plating removal, ink printing;

3.Semiconductor: integrated package bonding, Wire bond pretreatment, ceramic packaging, BGA/LED surface activation;

4.Circuit board: FPC/PCB organic cleaning and surface activation;

5.Plastic industry: surface modification, surface coarsening.

 SPK-500S  Wide Plasma Cleaning Machine

Specification of equipment:

Broad plasma host
Specification of the machineL1800×W1107×H1408mm
Requirements planningAC 220V/50Hz single phase 2.5KW
Plasma generator specification
POWER0-600W adjustable
Mains frequency13.56MHz
MatcherFully automatic vacuum capacitor matching unit


Plasma gun head specification
Treatment process800mm
Spear head sizeL570*W90*H74mm
The gun head is adjustable in height


0-10mm(regulation precision ±0.3)
Common processing height


From 1 to 5 mm or less


Cooling range of gun head


Process gas
The use of gasAr with O2 Two way gas
Ar Gas regulation range


O2 Gas regulation range


Pipeline specification
Pipeline speed0-100 – mm/s is adjustable


Feed belt1.5M
The belt materialskid resistance PU
Induction and alarm
Sensing systemCard and lamination induction and emergency stop
Call the policeWith sound and light alarm function

2.2 Factory specifications

Installation environment requirements
Demand for power supplyAC 220V/50Hz single phase 2.5KW
Hvac, argon gas





The equipments of oxygen





Service clearance100cm

2.3 General Requirements

General Requirements
Risk identificationHigh pressure hazard identification


Service environmenttemperature:15~30℃


Other matters needing attentionNo combustible gases, corrosive gases, explosions or reactive dust
Configuration list
Serial numberNameModel and specificationQuantityRemark
1Plasma power0-600W1
2Plasma matching unit


3Assembly lineLength 1800 mm * 520 mm wide


4PLCPanasonic PLC1
5Low voltage appliancesConventional electrical appliance


6FlowmeterAr  And  O22
7Cooling-water machine450W,5-35℃1
8Plasma head



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