SPV-100 Vacuum Plasma Cleaner,Plasma Surface Treatment Cleaner Machine
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Description
SPV-100 Vacuum Plasma Cleaner,Plasma Surface Treatment Cleaner Machine
Outline:
Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, environmental protection, efficient and stable surface treatment.
SPV-100 Vacuum Plasma Cleaner,Plasma Surface Treatment Cleaner Machine
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-100 Vacuum Plasma Cleaner,Plasma Surface Treatment Cleaner Machine
Industry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: packaging, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-100 Vacuum Plasma Cleaner,Plasma Surface Treatment Cleaner Machine
Specification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| power | 0~600W | 0~2000W | |
| frequency | 13.56MHz | 40KHz | |
|
Vacuum plant | Double-stage vane pump (oil pump)
|
60m3/h | |
| vacuum line | All stainless steel piping and high strength vacuum bellows | ||
| texture | Aluminum alloy (customizable stainless steel cavity) | ||
| thickness | 25mm | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 4450×450×500mm (width × height × depth) | ||
| Effective size of electrode plate | 420×411mm(width × depth) | ||
| Available space spacing | 22.5mm | ||
| Electrode layout
| Horizontal arrangement, activity extraction
| ||
| Work tray | Standard one set, material optional (aluminum, steel wire mesh) | ||
| work space | 8 layer | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas path | Standard with two, can be customized | ||
| Control system | systems control | PLC | |
| delivery method | 7 inch touch screen | ||
| Other parameters | boundary dimension | 900×1750×1000mm（w×h×d） | |
| weight | 200KG | ||
| Equipment appearance color | silver gray | ||
SPV-100 Vacuum Plasma Cleaner,Plasma Surface Treatment Cleaner Machine
Factory specifications:
| Factory specifications | |
| Ac power specification
| Power supply：AC380V，50/60Hz，5wire，50A |
| Factory exhaust
| Flow：2.0 m³/min |
| Gas requirements for plant work
| Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：6×4 mm Texture：PU pipe Purity：More than 99.99% |
| Factory compressed air requirements
| Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：8×5 mm Texture：PUpipe Dew point：-40℃ under Particle＞0.3μm：10Pcs/ft³ |
