SPV-150    Vacuum plasma cleaning machine


Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, environmental protection, efficient and stable surface treatment.

SPV-150    Vacuum plasma cleaning machine

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient


Industry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: packaging, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

SPV-150    Vacuum plasma cleaning machine

Specification of equipment:

Power systemradio-frequency power supplymedium-frequency power supply
power0~600W0~1000W or 0-2000W
Vacuum plantDouble-stage vane pump (oil pump)Double stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump
vacuum lineAll stainless steel piping and high strength vacuum bellows
textureAluminum alloy (customizable stainless steel cavity)
leakproofnessMilitary grade welding seal
Cavity internal dimensions500×500×670mm

(width × height × depth)

Effective size of electrode plate587×470mm(width × depth)
Available space spacing34mm
Electrode layoutHorizontal arrangement, activity extraction


Work trayStandard one set, material optional (aluminum, steel wire mesh)
work space8 layer
Gas systemflow range0~300SCCM
Process gas pathStandard with two, can be customized
Control systemsystems controlPLC
delivery method7 inch touch screen
Other parametersboundary dimension1020×1720×1120mm(w×h×d)
Equipment appearance colorsilver gray

Factory specifications:

Factory specifications
Ac power specification


Power supply:AC380V,50/60Hz,5wire,50A
Factory exhaust


Flow:2.0 m³/min
Gas requirements for plant work


Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5mm

Texture:PU pipe

Purity:More than 99.99%

Factory compressed air requirements


Flow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm


Dew point:-40℃ under


2.3 General  Requirements

General requirements
Risk identificationHigh pressure hazard identification


Service environmenttemperature:15~30℃


Other matters needing attentionNo combustible gases, corrosive gases, explosions or reactive dust

Gas cylinders need to be fixed

                             Configuration list
Serial NumberNamedescriptionunitquantity
1Main engineboundary dimension:1020×1720×1120mm

(width × height × depth)

2Love sincerelyAluminum alloy vacuum chamber

inside dimension 500×500×675mm

(width × height × depth)

3Excitation power supplyradio-frequency power supplyedium-frequency power supplySet1

Power 0 ~ 600 w

Or 0~1000W is optional;

Fully automatic vacuum capacitor matching unit


0~1000W or 0-2000w


5Touch screenWei lun tong,7 inch screen,MT6071iEPc1
6FlowmeterBritish wawick brandPc2
7Vacuum pumpFlyover double-stage vane pump (oil pump):60m3/hPc1
8Vacuum gaugeThe fu kangPc1
9SpecificationVacuum plasma cleaning machine spv-150 operation manualPc1

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