Description

ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
First, product introduction

1.Separate design, easy to move quickly

2.Wide detection range, large and small leakage can be detected

3.Leak detection port high pressure resistance, wide range of adaptation

4.Full LCD touch color screen

5.Leak detection state zero clear with one key

6.English and Chinese menu interface

7.The vacuum pump is easy to maintain

8.Long warranty of core parts.

ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
Two, the main technical indicators

Minimum detectable leakage rate5×10-13Pa·m3/sLeakage rate display range1×10-2 — 1×10-13Pa·m3/s
Startup time≤3 minutesResponse time≤1.0s
Maximum pressure of leak detection port1500PaUltimate pressure5×10-4Pa
Mechanical pump pumping speed3L/sPower supply requirements220V, 50Hz, single-phase, 10A
Working environment5-35ºCRelative humidity≤80%
Overall size550 (W) ×420 (D) ×900 (H)Weight70kg

ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
First, product introduction

1.Separate design, easy to move quickly

2.Wide detection range, large and small leakage can be detected

3.Leak detection port high pressure resistance, wide range of adaptation

4.Full LCD touch color screen

5.Leak detection state zero clear with one key

6.English and Chinese menu interface

7.The vacuum pump is easy to maintain

8.Long warranty of core parts.

ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
First, product introduction

1.Separate design, easy to move quickly

2.Wide detection range, large and small leakage can be detected

3.Leak detection port high pressure resistance, wide range of adaptation

4.Full LCD touch color screen

5.Leak detection state zero clear with one key

6.English and Chinese menu interface

7.The vacuum pump is easy to maintain

8.Long warranty of core parts.

ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
Two, the main technical indicators

Minimum detectable leakage rate5×10-13Pa·m3/sLeakage rate display range1×10-2 — 1×10-13Pa·m3/s
Startup time≤3 minutesResponse time≤1.0s
Maximum pressure of leak detection port1500PaUltimate pressure5×10-4Pa
Mechanical pump pumping speed3L/sPower supply requirements220V, 50Hz, single-phase, 10A
Working environment5-35ºCRelative humidity≤80%
Overall size550 (W) ×420 (D) ×900 (H)Weight70kg

 

ZXL-840 Separated Helium Mass Spectrometer Leak Detector for semiconductor and electronics
First, product introduction

1.Separate design, easy to move quickly

2.Wide detection range, large and small leakage can be detected

3.Leak detection port high pressure resistance, wide range of adaptation

4.Full LCD touch color screen

5.Leak detection state zero clear with one key

6.English and Chinese menu interface

7.The vacuum pump is easy to maintain

8.Long warranty of core parts.

Helium Mass Spectrometer Leak Detector






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