опис

СПВ-20 Машина вакуумного плазмового очищення

Outline:

Vacuum Plasma Cleaner(Плазмовий очищувач),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, охорона навколишнього середовища, efficient and stable surface treatment.

СПВ-20 Машина вакуумного плазмового очищення

Пroduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

СПВ-20 Машина вакуумного плазмового очищення

яndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: упаковка, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

СПВ-20 Машина вакуумного плазмового очищення

Тechnical specifications

Power systemRadio-frequency power supply
потужність0~300W
Частота13.56MHz
Vacuum system

 

Two-stage rotary vane pump (oil pump)

 

16m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
матеріалAluminum alloy (customizable stainless steel chamber)
Thickness25мм
Leakproofness

 

Military grade welding seal
Internal dimension of cavity20Л
Available space spacing22.5мм
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (алюміній, wire mesh)
Gas system

 

Flow range0~300SCCM
Process gas gas circuitStandard with two channels, можна налаштувати
Система контролюSystems controlPLC
Delivery method7 inch touch screen
The Other Parameter

 

Boundary dimension900×1600×900mm(W×H×D)
вага150КГ
Device appearance colorsilver gray

specification requirements

Factory specification requirements
Ac power specificationsБлок живлення:AC380V,50/60Гц,5лінії,50А
Factory exhaustFlow:2.0 m³/min
Gas requirements for factory workFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

матеріал: PU pipe

Чистота: вище 99.99%

Factory compressed air requirementsFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

матеріал: PU pipe

Dew point: below -40℃

Particle>0.3μm:10Pcs/ft³

configuration list

Configuration list
НемаєІм'яописодиницяQty
1ХостBoundary dimension:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamberPc1
3Excitation power supplyRadio-frequency power supplySet1
Частота:13.56MHz

потужність:0~300W

Automatic vacuum capacitor matcher

4PLCSIEMENSS7-200Pc1
5сенсорний екранVellon, 7 inch screen,MT6071iEPc1
6flowmeterBritish Wawick brandPc2
7Вакуумний насосFlyover two-stage rotary vane pump (oil pump):40m3/hPc1
8vacuum gaugeINFICON

 

Pc1
9Manual

 

Operation manual of vacuum plasma cleaner SPV-20Pc1






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