СПВ-20 Машина вакуумного плазмового очищення
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опис
СПВ-20 Машина вакуумного плазмового очищення
Outline:
Vacuum Plasma Cleaner(Плазмовий очищувач),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, охорона навколишнього середовища, efficient and stable surface treatment.
СПВ-20 Машина вакуумного плазмового очищення
Пroduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
СПВ-20 Машина вакуумного плазмового очищення
яndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: упаковка, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
СПВ-20 Машина вакуумного плазмового очищення
Тechnical specifications
Power system | Radio-frequency power supply | |
потужність | 0~300W | |
Частота | 13.56MHz | |
Vacuum system
| Two-stage rotary vane pump (oil pump)
| 16m3/h |
Vacuum line | All stainless steel piping, and high strength vacuum bellows | |
матеріал | Aluminum alloy (customizable stainless steel chamber) | |
Thickness | 25мм | |
Leakproofness
| Military grade welding seal | |
Internal dimension of cavity | 20Л | |
Available space spacing | 22.5мм | |
Electrode plate layout | Horizontal layout, movable extraction | |
Work tray | Standard set, material optional (алюміній, wire mesh) | |
Gas system
| Flow range | 0~300SCCM |
Process gas gas circuit | Standard with two channels, можна налаштувати | |
Система контролю | Systems control | PLC |
Delivery method | 7 inch touch screen | |
The Other Parameter
| Boundary dimension | 900×1600×900mm(W×H×D) |
вага | 150КГ | |
Device appearance color | silver gray |
specification requirements
Factory specification requirements | |
Ac power specifications | Блок живлення:AC380V,50/60Гц,5лінії,50А |
Factory exhaust | Flow:2.0 m³/min |
Gas requirements for factory work | Flow:1~10 L/min Pressure:3~7 kg/cm² Pipe diameter:6×4 mm матеріал: PU pipe Чистота: вище 99.99% |
Factory compressed air requirements | Flow:1~10 L/min Pressure:3~7 kg/cm² Pipe diameter:8×5 mm матеріал: PU pipe Dew point: below -40℃ Particle>0.3μm:10Pcs/ft³ |
configuration list
Configuration list | ||||
Немає | Ім'я | опис | одиниця | Qty |
1 | Хост | Boundary dimension:900×1600×900mm(W×H×D) | Pc | 1 |
2 | Vacuum chamber | Aluminum alloy vacuum chamber | Pc | 1 |
3 | Excitation power supply | Radio-frequency power supply | Set | 1 |
Частота:13.56MHz; потужність:0~300W Automatic vacuum capacitor matcher | ||||
4 | PLC | SIEMENS,S7-200 | Pc | 1 |
5 | сенсорний екран | Vellon, 7 inch screen,MT6071iE | Pc | 1 |
6 | flowmeter | British Wawick brand | Pc | 2 |
7 | Вакуумний насос | Flyover two-stage rotary vane pump (oil pump):40m3/h | Pc | 1 |
8 | vacuum gauge | INFICON
| Pc | 1 |
9 | Manual
| Operation manual of vacuum plasma cleaner SPV-20 | Pc | 1 |