前言
国际标准化组织 (国际标准化组织) 是国家标准机构的全球联合会 (ISO成员机构). 国际标准的制定通常通过ISO技术委员会进行. 每个对已成立技术委员会的主题感兴趣的成员团体都有权在委员会中派代表参加. 国际的, 与 ISO 联络的政府和非政府组织也参与了这项工作. ISO 与国际电工委员会密切合作 (国际电工委员会) 关于电气标准化的所有问题.

部分 1 ISO/IEC 指令的描述了用于制定本文件和进一步维护的程序. 尤其, 注意不同类型的 ISO 文件所需的不同批准标准. 本文件是根据第 2 部分的编辑规则起草的。 2 ISO/IEC 指令的 (请参阅 iso.org/directives).

请注意，本文档的某些内容可能是专利权的主题. ISO 不负责识别任何或所有此类专利. 在文档开发过程中确定的任何专利权的详细信息将包含在收到的 ISO 专利声明的介绍和/或列表中 (参见 iso.org/patents).

Any trade names used in this document are information provided for the convenience of the user and do not constitute an endorsement.

自愿性相关标准说明, ISO specific terms related to conformity assessment and the expression of meaning, and the ISO in the technical barriers to trade (技术性贸易壁垒) 坚持世界贸易组织原则 (世贸组织) 信息, please refer to the iso.org/iso/foreword.html.

This document has been prepared by ISO/TC 206 Technical Committee on Fine Ceramics.

Any feedback or questions on this document should be referred to the user’s national standards body. A complete list of these institutions can be found at iso.org/members.html.

国际标准化组织 23737-2021 “精细陶瓷 (先进陶瓷, 先进技术陶瓷) – 湿、干条件下精细陶瓷膜磨损和摩擦特性的评价方法”

介绍
Fine ceramic films are used in a variety of applications, such as sensors, actuators or other micromechanical components; Display element; Memory element; Recording media; Optical element; Packaging film; And films and glass for buildings and vehicles. In the industrial application of fine ceramic films, wear resistance is an important index for evaluation. The wear resistance of fine ceramic films is greatly affected by the ambient humidity and the humidity history of the films. Fine ceramic films are also used in different humidity environments where criteria are required to evaluate wear resistance and friction coefficient over a wide humidity range. The standards published to date for wear resistance testing only assume a temperature environment of 23 °C and a relative humidity of 50 %. The thickness of the film to be measured is also relatively large, with a few to 10μm. These test procedures are not suitable for evaluating the wear resistance of fine ceramic films with thickness up to approximately 1 µm for use in electronic and optical devices because the wear resistance of small indentation loads is affected by the relative humidity of the test environment, IE. the mechanism used in the wear testing of fine ceramic films with small indentation loads is strongly affected by the relative humidity of the test environment. 所以, the wear test of fine ceramic film should be carried out under the specified relative humidity conditions. This document provides measurements that help accurately assess the wear resistance of fine ceramic films, up to a thickness of approximately 1 微米, deposited on thin substrates or organic polymer films, in dry and high humidity environments. The present document has been developed to facilitate industrial development through the rapid dissemination of these measurements.

1 适用范围
This document specifies a method for testing the wear resistance and friction coefficient of fine ceramic films in dry and high humidity environments, where such films may be up to approximately 1 µm thick and deposited on a substrate or base, including thin or very thin organic polymer film substrates.

2 规范性参考文件
当上下文中引用以下文档时, 部分或全部构成本文件的要求. 对于注明日期的参考文献, 仅引用版本适用. 对于未注明日期的引文, the most recent version of the referenced document (包括任何修订) 适用.

国际标准化组织 3274, Geometric Product Specification (全球定位系统) – Surface texture: section method – Nominal characteristics of contact (stylus) 仪器

国际标准化组织 13565-1, Geometric Product Specification (全球定位系统) – Surface Texture: Section method Surfaces with layered functional properties – 部分 1: filtration and general measurement conditions

国际标准化组织 13565-2, Geometric Product Specification (全球定位系统) – Surface Texture: Section method Surfaces with layered functional properties – 部分 2: Characterization of heights using linear material ratio curves

国际标准化组织 20507, 精细陶瓷 (先进陶瓷, 先进技术陶瓷) — 词汇

3 术语和定义
就本文件而言, ISO 中给出的术语和定义 20507 和以下适用.

3.2 Friction force

The resistance exerted on a relative body when objects in contact move or tend to slide against each other

3.3 Friction coefficient

The dimensionless ratio of friction to the applied normal force

3.4 Wear test

Tests for the evaluation of friction and wear characteristics caused by sliding contact motion

笔记 1: In a narrow sense, the term “磨损测试” refers to the process by which wear occurs on the specimen as a result of sliding motion; In broad terms, it means processes such as sample preparation, wear formation, friction coefficient measurement, and evaluation of wear trajectoryand wear parts formed on the inverse material.

3.5 Drying Chamber

A sealed container for removing moisture from the surface of the sample while the sample is kept in a vacuum

3.6 相对湿度

Ratio of partial vapor pressure to saturated vapor pressure at a given temperature

3.7 Dry air

Air with a dew point of −60 °C or lower at an absolute pressure of 101.3 千帕

3.8 Dry Nitrogen

At an absolute pressure of 101.3 千帕, the dew point is −60 °C or lower nitrogen

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