Popis

SPV-20 Vacuum plasma cleaning machine

Outline:

Vacuum Plasma Cleaner(Plazmový čistič),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, ochrana životního prostředí, efficient and stable surface treatment.

SPV-20 Vacuum plasma cleaning machine

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

SPV-20 Vacuum plasma cleaning machine

průmyslová aplikace:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: obal, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

SPV-20 Vacuum plasma cleaning machine

Technical specifications

Power systemRadio-frequency power supply
Napájení0~300W
Frekvence13.56MHz
Vakuový systém

 

Two-stage rotary vane pump (oil pump)

 

16m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
MateriálAluminum alloy (customizable stainless steel chamber)
Tloušťka25mm
Leakproofness

 

Military grade welding seal
Internal dimension of cavity20L
Available space spacing22.5mm
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (hliník, wire mesh)
Gas system

 

Rozsah průtoku0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
Kontrolní systémSystems controlPLC
Delivery method7 palcová dotyková obrazovka
The Other Parameter

 

Boundary dimension900×1600×900mm(W×H×D)
Hmotnost150KG
Device appearance colorsilver gray

specification requirements

Factory specification requirements
Ac power specificationsZdroj napájení:AC380V,50/60Hz,5linky,50A
Factory exhaustFlow:2.0 m³/min
Gas requirements for factory workFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

Materiál: PU pipe

Purity: above 99.99%

Factory compressed air requirementsFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

Materiál: PU pipe

Dew point: below -40℃

Particle>0.3μm:10Pcs/ft³

configuration list

Seznam konfigurace
NenázevPopisJednotkamnožství
1HostBoundary dimension:900×1600×900mm(W×H×D)PC1
2 Vacuum chamberAluminum alloy vacuum chamberPC1
3Excitation power supplyRadio-frequency power supplySet1
Frekvence:13.56MHz;

Napájení:0~300W

Automatic vacuum capacitor matcher

4PLCSIEMENSS7-200PC1
5touch screenVellon, 7 inch screen,MT6071iEPC1
6flowmeterBritish Wawick brandPC2
7Vakuová pumpaFlyover two-stage rotary vane pump (oil pump):40m3/hPC1
8vacuum gaugeINFICON

 

PC1
9Manual

 

Operation manual of vacuum plasma cleaner SPV-20PC1






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