Опис

SPV-20 Vacuum plasma cleaning machine

Outline:

Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, заштита животне средине, efficient and stable surface treatment.

SPV-20 Vacuum plasma cleaning machine

Пroduct feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

SPV-20 Vacuum plasma cleaning machine

Иndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: паковање, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

SPV-20 Vacuum plasma cleaning machine

Тechnical specifications

Power systemRadio-frequency power supply
Снага0~300W
Фреквенција13.56MHz
Vacuum system

 

Two-stage rotary vane pump (oil pump)

 

16m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
МатеријалAluminum alloy (customizable stainless steel chamber)
Thickness25мм
Leakproofness

 

Military grade welding seal
Internal dimension of cavity20Л
Available space spacing22.5мм
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (алуминијум, wire mesh)
Gas system

 

Распон протока0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
Control systemSystems controlPLC
Delivery method7 инчни екран осетљив на додир
The Other Parameter

 

Boundary dimension900×1600×900mm(W×H×D)
Тежина150KG
Device appearance colorsilver gray

specification requirements

Factory specification requirements
Ac power specificationsНапајање:AC380V,50/60Хз,5линије,50А
Factory exhaustFlow:2.0 m³/min
Gas requirements for factory workFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:6×4 mm

Материјал: PU pipe

Purity: изнад 99.99%

Factory compressed air requirementsFlow:1~10 L/min

Pressure:3~7 kg/cm²

Pipe diameter:8×5 mm

Материјал: PU pipe

Dew point: below -40℃

Particle>0.3μm:10Pcs/ft³

configuration list

Configuration list
НеNameОписUnitQty
1HostBoundary dimension:900×1600×900mm(W×H×D)Пц1
2 Vacuum chamberAluminum alloy vacuum chamberПц1
3Excitation power supplyRadio-frequency power supplySet1
Фреквенција:13.56MHz

Снага:0~300W

Automatic vacuum capacitor matcher

4PLCSIEMENSS7-200Пц1
5touch screenVellon, 7 inch screen,MT6071iEПц1
6flowmeterBritish Wawick brandПц2
7Vacuum pumpFlyover two-stage rotary vane pump (oil pump):40m3/hПц1
8vacuum gaugeINFICON

 

Пц1
9Упутство

 

Operation manual of vacuum plasma cleaner SPV-20Пц1






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