SPV-60 Vacuum plasma cleaning machine
- Опис
- Упит
Опис
SPV-60 Vacuum plasma cleaning machine
Outline:
Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, заштита животне средине, efficient and stable surface treatment.
SPV-60 Vacuum plasma cleaning machine
Пroduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-60 Vacuum plasma cleaning machine
Иndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: паковање, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-60 Vacuum plasma cleaning machine
Тechnical specifications
| Power System
| Radio-frequency power supply | Medium-frequency power supply | |
| Снага | 0~600W | 0~1000W | |
| Фреквенција | 13.56MHz | 40KHz | |
| Vacuum system
| Two-stage rotary vane pump (oil pump) | 40m3/h | |
| Vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
| Материјал | Aluminum alloy (customizable stainless steel chamber) | ||
| Thickness | 25мм | ||
| Leakproofness | Military grade welding seal | ||
| Internal dimension of cavity | 375×375×430mm（W×H×D） | ||
| Effective size of electrode plate | 345×344mm（W×D） | ||
| Available space spacing | 22.5мм | ||
| Electrode plate layout | Horizontal layout, movable extraction | ||
| Work tray | Standard set, material optional (алуминијум, wire mesh) | ||
| Work space | 6 layers | ||
| Gas system
| Распон протока | 0~300SCCM | |
| Process gas gas circuit | Standard with two channels, can be customized | ||
| Control system | System control | PLC | |
| Delivery method | 7 инчни екран осетљив на додир | ||
| Other Parameter
| Boundary dimension | 900×1600×900mm（宽×高×深） | |
| Тежина | 150KG | ||
| Device appearance color | silver gray | ||
Factory specification requirements
| Factory specification requirements | |
| Ac power specifications | Напајање：AC380V，50/60Хз，5 линије，50А |
| Factory exhaust | Flow：2.0 m³/min |
| Gas requirements for factory work | Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：6×4 mm Материјал: PU pipe Purity: изнад 99.99% |
| Factory compressed air requirements | Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：8×5 mm Материјал: PU pipe Dew point: below -40℃ Particle＞0.3μm：10Pcs/ft³ |
Цonfiguration list
| configuration list | |||||
| Не | Name | Опис | Unit | Qty | |
| 1 | Host | Boundary dimension：900×1600×900mm（W×H×D） | Пц | 1 | |
| 2 | Vacuum chamber | Aluminum alloy vacuum chamber Inside dimension375×375×430mm（W×H×D） | Пц | 1 | |
| 3 | Excitation power supply | Radio-frequency power supply | Medium-frequency power supply | Set | 1 |
| Фреквенција：13.56MHz； Снага ：0~600W Automatic vacuum capacitor matcher | Фреквенција：40KHz； 0~1000W;
| ||||
| 4 | PLC | SIEMENS，S7-200 | Пц | 1 | |
| 5 | Touch screen | Vellon, 7 inch screen, MT6071iE | Пц | 1 | |
| 6 | Flowmeter | British Wawick brand | Пц | 2 | |
| 7 | Vacuum pump | Flyover two-stage rotary vane pump (oil pump) : 40m3/h | Пц | 1 | |
| 8 | Vacuum gauge | INFICON
| Пц | 1 | |
| 9 | Упутство
| Operation manual of vacuum plasma cleaner SPV-60 | Пц | 1 | |
Optional table
| Optional table | ||
| Excitation power supply | Radio-frequency power supply | Medium-frequency power supply |
| Custom power: frequency：13.56MHz； Снага：0~1000W； Custom automatic vacuum capacitor matching machine | Фреквенција：40KHz，power：2000В
| |
| CERES power supply: frequency 13.56MHz； Снага：0~600W or 0~1000W Optional ； American CERES automatic vacuum capacitor matcher | ||
| Vacuum pump | Germany Leibao double-stage rotary vane pump (oil pump)：40m3/h | |
| Flyover two-stage rotary vane pump (oil pump) ：40m3/h | ||
