SPV-150 Vakumlu plazma temizleme makinesi
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Tanım
SPV-150 Vakumlu plazma temizleme makinesi
Outline:
Vacuum Plasma Cleaner(Plazma temizleyici),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, çevresel koruma, efficient and stable surface treatment.
SPV-150 Vakumlu plazma temizleme makinesi
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
BENndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC endüstrisi: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Yarı iletken endüstrisi: semiconductor packaging, kamera modülü, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: ambalajlama, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-150 Vakumlu plazma temizleme makinesi
Specification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| güç | 0~600W | 0~1000W or 0-2000W | |
| sıklık | 13.56MHz | 40KHz | |
| Vacuum plant | Double-stage vane pump (oil pump) | Double stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping and high strength vacuum bellows | ||
| doku | Aluminum alloy (customizable stainless steel cavity) | ||
| kalınlık | 25mm | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 500×500×670mm (width × height × depth) | ||
| Effective size of electrode plate | 587×470mm(width × depth) | ||
| Available space spacing | 34mm | ||
| Electrode layout | Horizontal arrangement, activity extraction
| ||
| Work tray | Standard one set, material optional (alüminyum, steel wire mesh) | ||
| work space | 8 katman | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas path | Standard with two, kişiselleştirilebilir | ||
| Kontrol sistemi | systems control | PLC | |
| delivery method | 7 inch touch screen | ||
| Other parameters | sınır boyutu | 1020×1720×1120mm（w×h×d） | |
| ağırlık | 350KİLOGRAM | ||
| Equipment appearance color | silver gray | ||
Fabrika özellikleri:
| Fabrika özellikleri | |
| Ac güç özellikleri
| Güç kaynağı：AC380V，50/60Hz.，5tel，50A |
| Fabrika egzozu
| Flow：2.0 m³/dak |
| Gas requirements for plant work
| Flow：1~10 L/min Basınç：3~7 kg/cm² Pipe diameter：8×5mm Texture：PU boru Purity：Bundan fazla 99.99% |
| Fabrika basınçlı hava gereksinimleri
| Flow：1~10 L/min Basınç：3~7 kg/cm² Pipe diameter：8×5 mm Texture：PUpipe Dew point：-40℃ under Parçacık>0.3μm：10Adet/ft³ |
2.3 Ggenel olarak Rgereklilikler
| General requirements | |
| Risk tanımlaması | Yüksek basınç tehlikesinin tanımlanması
|
| Service environment | sıcaklık：15~30°C nem：30~70% |
| Other matters needing attention | Yanıcı olmayan gazlar, aşındırıcı gazlar, patlamalar veya reaktif toz Gas cylinders need to be fixed |
| Configuration list | |||||
| Serial Number | İsim | description | birim | quantity | |
| 1 | Main engine | sınır boyutu：1020×1720×1120mm (width × height × depth) | Pc | 1 | |
| 2 | Love sincerely | Aluminum alloy vacuum chamber inside dimension 500×500×675mm (width × height × depth) | Pc | 1 | |
| 3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Ayarlamak | 1 |
| sıklık：13.56MHz； Güç 0 ~ 600 w Or 0~1000W is optional; Fully automatic vacuum capacitor matching unit | sıklık：40KHz； 0~1000W or 0-2000w
| ||||
| 4 | PLC | Siemens，S7-200 | Pc | 1 | |
| 5 | Dokunmatik ekran | Wei lun tong，7 inch screen，MT6071iE | Pc | 1 | |
| 6 | Flowmeter | British wawick brand | Pc | 2 | |
| 7 | Vacuum pump | Flyover double-stage vane pump (oil pump)：60m3/h | Pc | 1 | |
| 8 | Vacuum gauge | The fu kang | Pc | 1 | |
| 9 | Şartname | Vacuum plasma cleaning machine spv-150 operation manual | Pc | 1 | |
