SPV-200 Vakumlu plazma temizleme makinesi
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Tanım
SPV-200 Vakumlu plazma temizleme makinesi
Outline:
Vacuum Plasma Cleaner(Plazma temizleyici),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, çevresel koruma, efficient and stable surface treatment.
SPV-200 Vakumlu plazma temizleme makinesi
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-200 Vakumlu plazma temizleme makinesi
BENndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC endüstrisi: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Yarı iletken endüstrisi: semiconductor packaging, kamera modülü, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: ambalajlama, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-200 Vakumlu plazma temizleme makinesi
Specification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| güç | 0~1000W | 0~2000W | |
| sıklık | 13.56MHz | 40KHz | |
| vacuum system | · multi cell pump
| Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
| · Material
| Aluminum alloy (customizable stainless steel chamber) | ||
| kalınlık | 25mm | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 600×600×600mm（W×H×D） | ||
| Effective size of electrode plate | 575×510mm（W×D） | ||
| Available space spacing | 34mm | ||
| Electrode plate layout | Horizontal layout, movable extraction | ||
| Work tray | Standard set, material optional (alüminyum, wire mesh) | ||
| work space | 8 katman | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas gas circuit | Standard two channels, kişiselleştirilebilir (argon, oksijen, azot, hidrojen, carbon tetrafluoride) | ||
| kontrol sistemi | systems control | PLC | |
| delivery method | 7 inch touch screen | ||
| · Other Parameter
| sınır boyutu | 1050×1750×1050mm（宽×高×深） | |
| ağırlık | 350KİLOGRAM | ||
| Device Appearance Color | silver gray | ||
Fabrika özellikleri:
| Fabrika özellikleri | |
| Ac güç özellikleri
| Güç kaynağı：AC380V，50/60Hz.，5tel，50A |
| Fabrika egzozu
| Flow：2.0 m³/dak |
| Gas requirements for plant work
| Flow：1~10 L/min Basınç：3~7 kg/cm² Pipe diameter：6×4 mm Texture：PU boru Purity：Bundan fazla 99.99% |
| Fabrika basınçlı hava gereksinimleri
| Flow：1~10 L/min Basınç：3~7 kg/cm² Pipe diameter：8×5 mm Texture：PU boru Dew point：-40℃ under Parçacık>0.3μm：10Adet/ft³ |
2.3 Ggenel olarak Rgereklilikler
| General requirements | |
| Risk tanımlaması | Yüksek basınç tehlikesinin tanımlanması
|
| Service environment | sıcaklık：15~30°C nem：30~70% |
| Other matters needing attention | Yanıcı olmayan gazlar, aşındırıcı gazlar, patlamalar veya reaktif toz Gas cylinders need to be fixed |
| Configuration list | |||||
| Serial Number | İsim | description | birim | quantity | |
| 1 | Main engine | sınır boyutu：1050×1750×1050mm (width × height × depth) | Pc | 1 | |
| 2 | Love sincerely | Aluminum alloy vacuum chamber inside dimension 450×450×500mm (width × height × depth) | Pc | 1 | |
| 3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Ayarlamak | 1 |
| sıklık：13.56MHz； Güç： 0~1000W Equipped with automatic vacuum capacitor matching machine | sıklık：40KHz； 0~2000W;
| ||||
| 4 | PLC | Siemens，S7-200 | Pc | 1 | |
| 5 | Dokunmatik ekran | Wei lun tong，7 inch screen，MT6071iE | Pc | 1 | |
| 6 | Flowmeter | · British wawick brand,Argon,Oksijen
| Pc | 2 | |
| 7 | Vacuum pump | Roots pump (BSJ70) -251 m3/h + single stage rotary vane pump (Laipo SV100B-100m3/h) | Pc | 1 | |
| 8 | Vacuum gauge | · INFICON
| Pc | 1 | |
| 9 | Şartname | Vacuum plasma cleaning machine spv-200 operation manual | Pc | 1 | |
