Tanım

SPV-20 Vakumlu plazma temizleme makinesi

Outline:

Vacuum Plasma Cleaner(Plazma temizleyici),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, çevresel koruma, efficient and stable surface treatment.

SPV-20 Vakumlu plazma temizleme makinesi

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

SPV-20 Vakumlu plazma temizleme makinesi

BENndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC endüstrisi: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.Yarı iletken endüstrisi: semiconductor packaging, kamera modülü, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: ambalajlama, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

SPV-20 Vakumlu plazma temizleme makinesi

Technical specifications

Power systemRadio-frequency power supply
Güç0~300W
Sıklık13.56MHz
Vacuum system

 

Two-stage rotary vane pump (oil pump)

 

16m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
MalzemeAluminum alloy (customizable stainless steel chamber)
Thickness25mm
Leakproofness

 

Military grade welding seal
Internal dimension of cavity20L
Available space spacing22.5mm
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (alüminyum, wire mesh)
Gas system

 

Akış aralığı0~300SCCM
Process gas gas circuitStandard with two channels, kişiselleştirilebilir
Kontrol sistemiSystems controlPLC
Delivery method7 inch touch screen
The Other Parameter

 

Sınır boyutu900×1600×900mm(W×H×D)
Ağırlık150KİLOGRAM
Device appearance colorsilver gray

specification requirements

Factory specification requirements
Ac power specificationsGüç kaynağı:AC380V,50/60Hz.,5çizgiler,50A
Fabrika egzozuFlow:2.0 m³/dak
Gas requirements for factory workFlow:1~10 L/min

Basınç:3~7 kg/cm²

Pipe diameter:6×4 mm

Malzeme: PU boru

Purity: üstünde 99.99%

Fabrika basınçlı hava gereksinimleriFlow:1~10 L/min

Basınç:3~7 kg/cm²

Pipe diameter:8×5 mm

Malzeme: PU boru

Dew point: below -40℃

Parçacık>0.3μm:10Adet/ft³

configuration list

Configuration list
HAYIRİsimTanımUnitAdet
1HostSınır boyutu:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamberPc1
3Excitation power supplyRadio-frequency power supplyAyarlamak1
Sıklık:13.56MHz;

Güç:0~300W

Automatic vacuum capacitor matcher

4PLCSIEMENS,S7-200Pc1
5touch screenVellon, 7 inch screen,MT6071iEPc1
6flowmeterBritish Wawick brandPc2
7Vacuum pumpFlyover two-stage rotary vane pump (oil pump):40m3/hPc1
8vacuum gaugeINFICON

 

Pc1
9Manuel

 

Operation manual of vacuum plasma cleaner SPV-20Pc1






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