SPV-20 Vakumlu plazma temizleme makinesi
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Tanım
SPV-20 Vakumlu plazma temizleme makinesi
Outline:
Vacuum Plasma Cleaner(Plazma temizleyici),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, çevresel koruma, efficient and stable surface treatment.
SPV-20 Vakumlu plazma temizleme makinesi
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-20 Vakumlu plazma temizleme makinesi
BENndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC endüstrisi: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Yarı iletken endüstrisi: semiconductor packaging, kamera modülü, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: ambalajlama, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-20 Vakumlu plazma temizleme makinesi
Technical specifications
Power system | Radio-frequency power supply | |
Güç | 0~300W | |
Sıklık | 13.56MHz | |
Vacuum system
| Two-stage rotary vane pump (oil pump)
| 16m3/h |
Vacuum line | All stainless steel piping, and high strength vacuum bellows | |
Malzeme | Aluminum alloy (customizable stainless steel chamber) | |
Thickness | 25mm | |
Leakproofness
| Military grade welding seal | |
Internal dimension of cavity | 20L | |
Available space spacing | 22.5mm | |
Electrode plate layout | Horizontal layout, movable extraction | |
Work tray | Standard set, material optional (alüminyum, wire mesh) | |
Gas system
| Akış aralığı | 0~300SCCM |
Process gas gas circuit | Standard with two channels, kişiselleştirilebilir | |
Kontrol sistemi | Systems control | PLC |
Delivery method | 7 inch touch screen | |
The Other Parameter
| Sınır boyutu | 900×1600×900mm(W×H×D) |
Ağırlık | 150KİLOGRAM | |
Device appearance color | silver gray |
specification requirements
Factory specification requirements | |
Ac power specifications | Güç kaynağı:AC380V,50/60Hz.,5çizgiler,50A |
Fabrika egzozu | Flow:2.0 m³/dak |
Gas requirements for factory work | Flow:1~10 L/min Basınç:3~7 kg/cm² Pipe diameter:6×4 mm Malzeme: PU boru Purity: üstünde 99.99% |
Fabrika basınçlı hava gereksinimleri | Flow:1~10 L/min Basınç:3~7 kg/cm² Pipe diameter:8×5 mm Malzeme: PU boru Dew point: below -40℃ Parçacık>0.3μm:10Adet/ft³ |
configuration list
Configuration list | ||||
HAYIR | İsim | Tanım | Unit | Adet |
1 | Host | Sınır boyutu:900×1600×900mm(W×H×D) | Pc | 1 |
2 | Vacuum chamber | Aluminum alloy vacuum chamber | Pc | 1 |
3 | Excitation power supply | Radio-frequency power supply | Ayarlamak | 1 |
Sıklık:13.56MHz; Güç:0~300W Automatic vacuum capacitor matcher | ||||
4 | PLC | SIEMENS,S7-200 | Pc | 1 |
5 | touch screen | Vellon, 7 inch screen,MT6071iE | Pc | 1 |
6 | flowmeter | British Wawick brand | Pc | 2 |
7 | Vacuum pump | Flyover two-stage rotary vane pump (oil pump):40m3/h | Pc | 1 |
8 | vacuum gauge | INFICON
| Pc | 1 |
9 | Manuel
| Operation manual of vacuum plasma cleaner SPV-20 | Pc | 1 |