SPV-150 Vacuum plasma cleaning machine
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опис
SPV-150 Vacuum plasma cleaning machine
Outline:
Vacuum Plasma Cleaner(Плазмовий очищувач),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, охорона навколишнього середовища, efficient and stable surface treatment.
SPV-150 Vacuum plasma cleaning machine
Пroduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
яndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: упаковка, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-150 Vacuum plasma cleaning machine
Сpecification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| потужність | 0~600W | 0~1000W or 0-2000W | |
| frequency | 13.56MHz | 40KHz | |
| Vacuum plant | Double-stage vane pump (oil pump) | Double stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping and high strength vacuum bellows | ||
| texture | Aluminum alloy (customizable stainless steel cavity) | ||
| товщина | 25мм | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 500×500×670mm (width × height × depth) | ||
| Effective size of electrode plate | 587×470mm(width × depth) | ||
| Available space spacing | 34мм | ||
| Electrode layout | Horizontal arrangement, activity extraction
| ||
| Work tray | Standard one set, material optional (алюміній, steel wire mesh) | ||
| work space | 8 layer | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas path | Standard with two, можна налаштувати | ||
| Система контролю | systems control | PLC | |
| delivery method | 7 inch touch screen | ||
| Other parameters | boundary dimension | 1020×1720×1120mm（w×h×d） | |
| вага | 350КГ | ||
| Equipment appearance color | silver gray | ||
Factory specifications:
| Factory specifications | |
| Ac power specification
| Блок живлення：AC380V，50/60Гц，5дріт，50А |
| Factory exhaust
| Flow：2.0 m³/min |
| Gas requirements for plant work
| Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：8×5mm Texture：PU pipe Чистота：Більш ніж 99.99% |
| Factory compressed air requirements
| Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：8×5 mm Texture：PUpipe Dew point：-40℃ under Particle＞0.3μm：10Pcs/ft³ |
2.3 Гeneral Рequirements
| Загальні вимоги | |
| Risk identification | High pressure hazard identification
|
| Service environment | температура：15~30℃ вологість：30~70% |
| Other matters needing attention | No combustible gases, corrosive gases, explosions or reactive dust Gas cylinders need to be fixed |
| Configuration list | |||||
| Serial Number | Ім'я | опис | unit | кількість | |
| 1 | Main engine | boundary dimension：1020×1720×1120mm (width × height × depth) | Pc | 1 | |
| 2 | Love sincerely | Aluminum alloy vacuum chamber inside dimension 500×500×675mm (width × height × depth) | Pc | 1 | |
| 3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Set | 1 |
| frequency：13.56MHz； потужність 0 ~ 600 w Or 0~1000W is optional; Fully automatic vacuum capacitor matching unit | frequency：40KHz； 0~1000W or 0-2000w
| ||||
| 4 | PLC | Siemens，S7-200 | Pc | 1 | |
| 5 | Сенсорний екран | Wei lun tong，7 inch screen，MT6071iE | Pc | 1 | |
| 6 | Flowmeter | British wawick brand | Pc | 2 | |
| 7 | Вакуумний насос | Flyover double-stage vane pump (oil pump)：60m3/h | Pc | 1 | |
| 8 | Vacuum gauge | The fu kang | Pc | 1 | |
| 9 | Специфікація | Vacuum plasma cleaning machine spv-150 operation manual | Pc | 1 | |
