СПВ-200 Вакуумна плазмова очисна машина
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опис
СПВ-200 Вакуумна плазмова очисна машина
Outline:
Vacuum Plasma Cleaner(Plasma cleaner),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, охорона навколишнього середовища, efficient and stable surface treatment.
СПВ-200 Вакуумна плазмова очисна машина
Пroduct feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
СПВ-200 Вакуумна плазмова очисна машина
яndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: упаковка, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
СПВ-200 Вакуумна плазмова очисна машина
Сpecification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| потужність | 0~1000W | 0~2000W | |
| frequency | 13.56MHz | 40KHz | |
| vacuum system | · multi cell pump
| Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
| · Material
| Aluminum alloy (customizable stainless steel chamber) | ||
| товщина | 25мм | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 600×600×600mm（W×H×D） | ||
| Effective size of electrode plate | 575×510mm（W×D） | ||
| Available space spacing | 34мм | ||
| Electrode plate layout | Horizontal layout, movable extraction | ||
| Work tray | Standard set, material optional (алюміній, wire mesh) | ||
| work space | 8 layer | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas gas circuit | Standard two channels, можна налаштувати (argon, кисень, азот, водень, carbon tetrafluoride) | ||
| control system | systems control | PLC | |
| delivery method | 7 inch touch screen | ||
| · Other Parameter
| boundary dimension | 1050×1750×1050mm（宽×高×深） | |
| вага | 350КГ | ||
| Device Appearance Color | silver gray | ||
Factory specifications:
| Factory specifications | |
| Ac power specification
| Блок живлення：AC380V，50/60Гц，5дріт，50А |
| Factory exhaust
| Flow：2.0 m³/min |
| Gas requirements for plant work
| Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：6×4 mm Texture：PU pipe Чистота：Більш ніж 99.99% |
| Factory compressed air requirements
| Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：8×5 mm Texture：PU pipe Dew point：-40℃ under Particle＞0.3μm：10Pcs/ft³ |
2.3 Гeneral Рequirements
| Загальні вимоги | |
| Risk identification | High pressure hazard identification
|
| Service environment | температура：15~30℃ вологість：30~70% |
| Other matters needing attention | No combustible gases, corrosive gases, explosions or reactive dust Gas cylinders need to be fixed |
| Configuration list | |||||
| Serial Number | Ім'я | опис | unit | кількість | |
| 1 | Main engine | boundary dimension：1050×1750×1050mm (width × height × depth) | Pc | 1 | |
| 2 | Love sincerely | Aluminum alloy vacuum chamber inside dimension 450×450×500mm (width × height × depth) | Pc | 1 | |
| 3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Set | 1 |
| frequency：13.56MHz； потужність： 0~1000W Equipped with automatic vacuum capacitor matching machine | frequency：40KHz； 0~2000W;
| ||||
| 4 | PLC | Siemens，S7-200 | Pc | 1 | |
| 5 | Сенсорний екран | Wei lun tong，7 inch screen，MT6071iE | Pc | 1 | |
| 6 | Flowmeter | · British wawick brand,Argon,Oxygen
| Pc | 2 | |
| 7 | Вакуумний насос | Roots pump (BSJ70) -251 m3/h + single stage rotary vane pump (Laipo SV100B-100m3/h) | Pc | 1 | |
| 8 | Vacuum gauge | · INFICON
| Pc | 1 | |
| 9 | Специфікація | Vacuum plasma cleaning machine spv-200 operation manual | Pc | 1 | |
