SPV-200 Vakuový plazmový čisticí stroj
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Popis
SPV-200 Vakuový plazmový čisticí stroj
Outline:
Vacuum Plasma Cleaner(Plazmový čistič),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, ochrana životního prostředí, efficient and stable surface treatment.
SPV-200 Vakuový plazmový čisticí stroj
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-200 Vakuový plazmový čisticí stroj
jáprůmyslová aplikace:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: obal, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-200 Vakuový plazmový čisticí stroj
Sspecifikace zařízení:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| Napájení | 0~1000W | 0~2000W | |
| frekvence | 13.56MHz | 40KHz | |
| vacuum system | · multi cell pump
| Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
| · Material
| Aluminum alloy (customizable stainless steel chamber) | ||
| tloušťka | 25mm | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 600×600×600mm（W×H×D） | ||
| Effective size of electrode plate | 575×510mm（W×D） | ||
| Available space spacing | 34mm | ||
| Electrode plate layout | Horizontal layout, movable extraction | ||
| Work tray | Standard set, material optional (hliník, wire mesh) | ||
| work space | 8 vrstva | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas gas circuit | Standard two channels, can be customized (argon, kyslík, dusík, vodík, carbon tetrafluoride) | ||
| kontrolní systém | systems control | PLC | |
| delivery method | 7 palcová dotyková obrazovka | ||
| · Other Parameter
| hraniční rozměr | 1050×1750×1050mm（宽×高×深） | |
| hmotnost | 350KG | ||
| Device Appearance Color | silver gray | ||
Tovární specifikace:
| Tovární specifikace | |
| Ac power specification
| Zdroj napájení：AC380V，50/60Hz，5drát，50A |
| Factory exhaust
| Flow：2.0 m³/min |
| Gas requirements for plant work
| Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：6×4 mm Texture：PU pipe Purity：More than 99.99% |
| Factory compressed air requirements
| Flow：1~10 L/min Pressure：3~7 kg/cm² Pipe diameter：8×5 mm Texture：PU pipe Dew point：-40℃ under Particle＞0.3μm：10Pcs/ft³ |
2.3 General Requirements
| General requirements | |
| Identifikace rizika | Identifikace nebezpečí vysokého tlaku
|
| Servisní prostředí | teplota：15~30 ℃ vlhkost vzduchu：30~70 % |
| Další záležitosti vyžadující pozornost | Nehořlavé plyny, korozivní plyny, výbuchy nebo reaktivní prach Gas cylinders need to be fixed |
| Seznam konfigurace | |||||
| Serial Number | název | description | jednotka | Množství | |
| 1 | Main engine | hraniční rozměr：1050×1750×1050mm (width × height × depth) | PC | 1 | |
| 2 | Love sincerely | Aluminum alloy vacuum chamber inside dimension 450×450×500mm (width × height × depth) | PC | 1 | |
| 3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Set | 1 |
| frekvence：13.56MHz； Napájení： 0~1000W Equipped with automatic vacuum capacitor matching machine | frekvence：40KHz； 0~2000W;
| ||||
| 4 | PLC | Siemens，S7-200 | PC | 1 | |
| 5 | Dotyková obrazovka | Wei lun tong，7 inch screen，MT6071iE | PC | 1 | |
| 6 | Průtokoměr | · British wawick brand,Argon,Oxygen
| PC | 2 | |
| 7 | Vakuová pumpa | Roots pump (BSJ70) -251 m3/h + single stage rotary vane pump (Laipo SV100B-100m3/h) | PC | 1 | |
| 8 | Vacuum gauge | · INFICON
| PC | 1 | |
| 9 | Specifikace | Vacuum plasma cleaning machine spv-200 operation manual | PC | 1 | |
