説明

SPV-20 真空プラズマ洗浄機

Outline:

Vacuum Plasma Cleaner(プラズマクリーナー),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, 環境を守ること, efficient and stable surface treatment.

SPV-20 真空プラズマ洗浄機

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

SPV-20 真空プラズマ洗浄機

ndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.半導体産業: semiconductor packaging, カメラモジュール, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: 梱包, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

SPV-20 真空プラズマ洗浄機

Technical specifications

Power systemRadio-frequency power supply
0~300W
頻度13.56MHz
Vacuum system

 

Two-stage rotary vane pump (oil pump)

 

16m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
材料Aluminum alloy (customizable stainless steel chamber)
厚さ25んん
Leakproofness

 

Military grade welding seal
Internal dimension of cavity20L
Available space spacing22.5んん
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (アルミニウム, wire mesh)
Gas system

 

Flow range0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
制御システムSystems controlPLC
Delivery method7 インチのタッチスクリーン
The Other Parameter

 

Boundary dimension900×1600×900mm(W×H×D)
重さ150KG
Device appearance colorsilver gray

specification requirements

Factory specification requirements
Ac power specifications電源:AC380V,50/60Hz,5行,50あ
工場排気流れ:2.0 m3/分
Gas requirements for factory work流れ:1~10 L/min

プレッシャー:3~7 kg/cm2

Pipe diameter:6×4 mm

材料: PUパイプ

Purity: その上 99.99%

Factory compressed air requirements流れ:1~10 L/min

プレッシャー:3~7 kg/cm2

Pipe diameter:8×5 mm

材料: PUパイプ

Dew point: below -40℃

粒子>0.3μm:10個/ft3

configuration list

構成リスト
いいえ名前説明ユニット数量
1ホストBoundary dimension:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamberPc1
3Excitation power supplyRadio-frequency power supplySet1
頻度:13.56MHz;

力:0~300W

Automatic vacuum capacitor matcher

4PLCSIEMENSS7-200Pc1
5タッチスクリーンVellon, 7 inch screen,MT6071iEPc1
6flowmeterBritish Wawick brandPc2
7真空ポンプFlyover two-stage rotary vane pump (oil pump):40m3/hPc1
8vacuum gaugeINFICON

 

Pc1
9マニュアル

 

Operation manual of vacuum plasma cleaner SPV-20Pc1






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