- 説明
- 問い合わせ
説明
SPV-100 真空プラズマクリーナー,プラズマ表面処理洗浄機
Outline:
Vacuum Plasma Cleaner(プラズマクリーナー),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, 環境を守ること, efficient and stable surface treatment.
SPV-100 真空プラズマクリーナー,プラズマ表面処理洗浄機
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-100 真空プラズマクリーナー,プラズマ表面処理洗浄機
私ndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.半導体産業: semiconductor packaging, カメラモジュール, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: 梱包, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-100 真空プラズマクリーナー,プラズマ表面処理洗浄機
Specification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| 力 | 0~600W | 0~2000W | |
| 頻度 | 13.56MHz | 40KHz | |
|
Vacuum plant | Double-stage vane pump (oil pump)
|
60m3/h | |
| vacuum line | All stainless steel piping and high strength vacuum bellows | ||
| テクスチャ | Aluminum alloy (customizable stainless steel cavity) | ||
| 厚さ | 25んん | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 4450×450×500mm (width × height × depth) | ||
| Effective size of electrode plate | 420×411mm(width × depth) | ||
| Available space spacing | 22.5んん | ||
| Electrode layout
| Horizontal arrangement, activity extraction
| ||
| Work tray | Standard one set, material optional (アルミニウム, steel wire mesh) | ||
| work space | 8 layer | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas path | Standard with two, can be customized | ||
| 制御システム | systems control | PLC | |
| delivery method | 7 インチのタッチスクリーン | ||
| Other parameters | 境界寸法 | 900×1750×1000mm（w×h×d） | |
| 重さ | 200KG | ||
| Equipment appearance color | silver gray | ||
SPV-100 真空プラズマクリーナー,プラズマ表面処理洗浄機
工場仕様:
| 工場仕様 | |
| AC電源仕様
| 電源：AC380V，50/60Hz，5ワイヤー，50あ |
| 工場排気
| 流れ：2.0 m3/分 |
| Gas requirements for plant work
| 流れ：1~10 L/min プレッシャー：3~7 kg/cm2 Pipe diameter：6×4 mm Texture：PUパイプ Purity：より多い 99.99% |
| Factory compressed air requirements
| 流れ：1~10 L/min プレッシャー：3~7 kg/cm2 Pipe diameter：8×5 mm Texture：PUpipe Dew point：-40℃ under 粒子＞0.3μm：10個/ft3 |
