SPV-200 Vacuum plasma cleaning machine
- 説明
- 問い合わせ
説明
SPV-200 Vacuum plasma cleaning machine
Outline:
Vacuum Plasma Cleaner(プラズマクリーナー),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, 環境を守ること, efficient and stable surface treatment.
SPV-200 Vacuum plasma cleaning machine
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-200 Vacuum plasma cleaning machine
私ndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.半導体産業: semiconductor packaging, カメラモジュール, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: 梱包, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-200 Vacuum plasma cleaning machine
Specification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| 力 | 0~1000W | 0~2000W | |
| 頻度 | 13.56MHz | 40KHz | |
| vacuum system | · multi cell pump
| Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
| · Material
| Aluminum alloy (customizable stainless steel chamber) | ||
| 厚さ | 25んん | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 600×600×600mm（W×H×D） | ||
| Effective size of electrode plate | 575×510mm（W×D） | ||
| Available space spacing | 34んん | ||
| Electrode plate layout | Horizontal layout, movable extraction | ||
| Work tray | Standard set, material optional (アルミニウム, wire mesh) | ||
| work space | 8 layer | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas gas circuit | Standard two channels, can be customized (アルゴン, 酸素, 窒素, 水素, carbon tetrafluoride) | ||
| control system | systems control | PLC | |
| delivery method | 7 インチのタッチスクリーン | ||
| · Other Parameter
| 境界寸法 | 1050×1750×1050mm（宽×高×深） | |
| 重さ | 350KG | ||
| Device Appearance Color | silver gray | ||
工場仕様:
| 工場仕様 | |
| AC電源仕様
| 電源：AC380V，50/60Hz，5ワイヤー，50あ |
| 工場排気
| 流れ：2.0 m3/分 |
| Gas requirements for plant work
| 流れ：1~10 L/min プレッシャー：3~7 kg/cm2 Pipe diameter：6×4 mm Texture：PUパイプ Purity：より多い 99.99% |
| Factory compressed air requirements
| 流れ：1~10 L/min プレッシャー：3~7 kg/cm2 Pipe diameter：8×5 mm Texture：PUパイプ Dew point：-40℃ under 粒子＞0.3μm：10個/ft3 |
2.3 G一般的に R要件
| 一般的な要件 | |
| リスクの特定 | 高圧の危険性の特定
|
| Service environment | 温度：15～30℃ 湿度：30~70% |
| Other matters needing attention | 不燃性ガス, 腐食性ガス, 爆発または反応性粉塵 Gas cylinders need to be fixed |
| 構成リスト | |||||
| シリアルナンバー | 名前 | description | ユニット | quantity | |
| 1 | メインエンジン | 境界寸法：1050×1750×1050mm (width × height × depth) | Pc | 1 | |
| 2 | Love sincerely | Aluminum alloy vacuum chamber inside dimension 450×450×500mm (width × height × depth) | Pc | 1 | |
| 3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Set | 1 |
| 頻度：13.56MHz； 力： 0~1000W Equipped with automatic vacuum capacitor matching machine | 頻度：40KHz； 0~2000W;
| ||||
| 4 | PLC | Siemens，S7-200 | Pc | 1 | |
| 5 | タッチスクリーン | Wei lun tong，7 inch screen，MT6071iE | Pc | 1 | |
| 6 | 流量計 | · British wawick brand,Argon,Oxygen
| Pc | 2 | |
| 7 | 真空ポンプ | Roots pump (BSJ70) -251 m3/h + single stage rotary vane pump (Laipo SV100B-100m3/h) | Pc | 1 | |
| 8 | Vacuum gauge | · INFICON
| Pc | 1 | |
| 9 | 仕様 | Vacuum plasma cleaning machine spv-200 operation manual | Pc | 1 | |
