- 説明
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説明
SPV-150 真空プラズマ洗浄機
Outline:
Vacuum Plasma Cleaner(プラズマクリーナー),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, 環境を守ること, efficient and stable surface treatment.
SPV-150 真空プラズマ洗浄機
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
私ndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.半導体産業: semiconductor packaging, カメラモジュール, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: 梱包, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-150 真空プラズマ洗浄機
Specification of equipment:
| Power system | radio-frequency power supply | medium-frequency power supply | |
| 力 | 0~600W | 0~1000W or 0-2000W | |
| 頻度 | 13.56MHz | 40KHz | |
| Vacuum plant | Double-stage vane pump (oil pump) | Double stage rotary vane pump (oil pump) or Roots pump + single stage rotary vane pump | |
| vacuum line | All stainless steel piping and high strength vacuum bellows | ||
| テクスチャ | Aluminum alloy (customizable stainless steel cavity) | ||
| 厚さ | 25んん | ||
| leakproofness | Military grade welding seal | ||
| Cavity internal dimensions | 500×500×670mm (width × height × depth) | ||
| Effective size of electrode plate | 587×470mm(width × depth) | ||
| Available space spacing | 34んん | ||
| Electrode layout | Horizontal arrangement, activity extraction
| ||
| Work tray | Standard one set, material optional (アルミニウム, steel wire mesh) | ||
| work space | 8 layer | ||
| Gas system | flow range | 0~300SCCM | |
| Process gas path | Standard with two, can be customized | ||
| 制御システム | systems control | PLC | |
| delivery method | 7 インチのタッチスクリーン | ||
| Other parameters | 境界寸法 | 1020×1720×1120mm（w×h×d） | |
| 重さ | 350KG | ||
| Equipment appearance color | silver gray | ||
工場仕様:
| 工場仕様 | |
| AC電源仕様
| 電源：AC380V，50/60Hz，5ワイヤー，50あ |
| 工場排気
| 流れ：2.0 m3/分 |
| Gas requirements for plant work
| 流れ：1~10 L/min プレッシャー：3~7 kg/cm2 Pipe diameter：8×5mm Texture：PUパイプ Purity：より多い 99.99% |
| Factory compressed air requirements
| 流れ：1~10 L/min プレッシャー：3~7 kg/cm2 Pipe diameter：8×5 mm Texture：PUpipe Dew point：-40℃ under 粒子＞0.3μm：10個/ft3 |
2.3 G一般的に R要件
| 一般的な要件 | |
| リスクの特定 | 高圧の危険性の特定
|
| Service environment | 温度：15～30℃ 湿度：30~70% |
| Other matters needing attention | 不燃性ガス, 腐食性ガス, 爆発または反応性粉塵 Gas cylinders need to be fixed |
| 構成リスト | |||||
| シリアルナンバー | 名前 | description | ユニット | quantity | |
| 1 | メインエンジン | 境界寸法：1020×1720×1120mm (width × height × depth) | Pc | 1 | |
| 2 | Love sincerely | Aluminum alloy vacuum chamber inside dimension 500×500×675mm (width × height × depth) | Pc | 1 | |
| 3 | Excitation power supply | radio-frequency power supply | edium-frequency power supply | Set | 1 |
| 頻度：13.56MHz； 力 0 ～ 600 w Or 0~1000W is optional; Fully automatic vacuum capacitor matching unit | 頻度：40KHz； 0~1000W or 0-2000w
| ||||
| 4 | PLC | Siemens，S7-200 | Pc | 1 | |
| 5 | タッチスクリーン | Wei lun tong，7 inch screen，MT6071iE | Pc | 1 | |
| 6 | 流量計 | British wawick brand | Pc | 2 | |
| 7 | 真空ポンプ | Flyover double-stage vane pump (oil pump)：60m3/h | Pc | 1 | |
| 8 | Vacuum gauge | The fu kang | Pc | 1 | |
| 9 | 仕様 | Vacuum plasma cleaning machine spv-150 operation manual | Pc | 1 | |
