説明

SPV-60 真空プラズマ洗浄機

Outline:

Vacuum Plasma Cleaner(プラズマクリーナー),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, 環境を守ること, efficient and stable surface treatment.

SPV-60 真空プラズマ洗浄機

Product feature:

1.Product placement fixture flexible, can adapt to irregular products

2.Horizontal electrode design can meet the requirements of soft product processing.

3.Low energy and gas consumption products.

4.Convenient way to put up and down the board

5.Vacuum system integration, small footprint

6.Reasonable plasma reaction space, so that the treatment is more uniform

7.Integrated control system design makes operation more convenient

SPV-60 真空プラズマ洗浄機

ndustry application:

1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation

2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning

3.半導体産業: semiconductor packaging, カメラモジュール, LED packaging, BGA packaging, 4.Wire Bond pretreatment

5.Ceramics: 梱包, pre-treatment of glue

6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching

7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation

8.Clean the surface before applying ITO

SPV-60 真空プラズマ洗浄機

Technical specifications

Power System

 

Radio-frequency power supplyMedium-frequency power supply
0~600W0~1000W
頻度13.56MHz40KHz
Vacuum system

 

Two-stage rotary vane pump (oil pump)40m3/h
Vacuum lineAll stainless steel piping, and high strength vacuum bellows
材料Aluminum alloy (customizable stainless steel chamber)
厚さ25んん
LeakproofnessMilitary grade welding seal
Internal dimension of cavity375×375×430mm(W×H×D)
Effective size of electrode plate345×344mm(W×D)
Available space spacing22.5んん
Electrode plate layoutHorizontal layout, movable extraction
Work trayStandard set, material optional (アルミニウム, wire mesh)
Work space6 layers
Gas system

 

Flow range0~300SCCM
Process gas gas circuitStandard with two channels, can be customized
制御システムSystem controlPLC
Delivery method7 インチのタッチスクリーン
Other Parameter

 

Boundary dimension900×1600×900mm(宽×高×深)
重さ150KG
Device appearance colorsilver gray


Factory specification requirements

Factory specification requirements
Ac power specifications電源:AC380V,50/60Hz,5 行,50あ
工場排気流れ:2.0 m3/分
Gas requirements for factory work流れ:1~10 L/min

プレッシャー:3~7 kg/cm2

Pipe diameter:6×4 mm

材料: PUパイプ

Purity: その上 99.99%

Factory compressed air requirements流れ:1~10 L/min

プレッシャー:3~7 kg/cm2

Pipe diameter:8×5 mm

材料: PUパイプ

Dew point: below -40℃

粒子>0.3μm:10個/ft3

Configuration list

configuration list
いいえ名前説明ユニット数量
1ホストBoundary dimension:900×1600×900mm(W×H×D)Pc1
2 Vacuum chamberAluminum alloy vacuum chamber

Inside dimension375×375×430mm(W×H×D)

Pc1
3Excitation power supplyRadio-frequency power supplyMedium-frequency power supplySet1
頻度:13.56MHz;

力 :0~600W

Automatic vacuum capacitor matcher

頻度:40KHz;

0~1000W;

 

4PLCSIEMENSS7-200Pc1
5タッチスクリーンVellon, 7 inch screen, MT6071iEPc1
6流量計British Wawick brandPc2
7真空ポンプFlyover two-stage rotary vane pump (oil pump) : 40m3/hPc1
8Vacuum gaugeINFICON

 

Pc1
9マニュアル

 

Operation manual of vacuum plasma cleaner SPV-60Pc1

Optional table

Optional table
Excitation power supplyRadio-frequency power supplyMedium-frequency power supply
Custom power: 頻度:13.56MHz;

力:0~1000W

Custom automatic vacuum capacitor matching machine

頻度:40KHz,力:2000W

 

CERES power supply: frequency 13.56MHz

力:0~600W or 0~1000W Optional

American CERES automatic vacuum capacitor matcher

真空ポンプGermany Leibao double-stage rotary vane pump (oil pump):40m3/h
Flyover two-stage rotary vane pump (oil pump) :40m3/h






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