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説明
SPV-60 真空プラズマ洗浄機
Outline:
Vacuum Plasma Cleaner(プラズマクリーナー),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, 環境を守ること, efficient and stable surface treatment.
SPV-60 真空プラズマ洗浄機
Product feature:
1.Product placement fixture flexible, can adapt to irregular products
2.Horizontal electrode design can meet the requirements of soft product processing.
3.Low energy and gas consumption products.
4.Convenient way to put up and down the board
5.Vacuum system integration, small footprint
6.Reasonable plasma reaction space, so that the treatment is more uniform
7.Integrated control system design makes operation more convenient
SPV-60 真空プラズマ洗浄機
私ndustry application:
1.Mobile phone industry: TP, middle frame, back cover surface cleaning activation
2.PCB/FPC industry: hole drilling and surface cleaning, Coverlay surface coarsening and cleaning
3.半導体産業: semiconductor packaging, カメラモジュール, LED packaging, BGA packaging, 4.Wire Bond pretreatment
5.Ceramics: 梱包, pre-treatment of glue
6.Surface roughening etching: PI surface roughening, PPS etching, semiconductor silicon chip PN junction removal, ITO film etching
7.Plastic materials: Teflon surface activation, ABS surface activation, and other plastic material cleaning activation
8.Clean the surface before applying ITO
SPV-60 真空プラズマ洗浄機
Technical specifications
Power System
| Radio-frequency power supply | Medium-frequency power supply | |
力 | 0~600W | 0~1000W | |
頻度 | 13.56MHz | 40KHz | |
Vacuum system
| Two-stage rotary vane pump (oil pump) | 40m3/h | |
Vacuum line | All stainless steel piping, and high strength vacuum bellows | ||
材料 | Aluminum alloy (customizable stainless steel chamber) | ||
厚さ | 25んん | ||
Leakproofness | Military grade welding seal | ||
Internal dimension of cavity | 375×375×430mm(W×H×D) | ||
Effective size of electrode plate | 345×344mm(W×D) | ||
Available space spacing | 22.5んん | ||
Electrode plate layout | Horizontal layout, movable extraction | ||
Work tray | Standard set, material optional (アルミニウム, wire mesh) | ||
Work space | 6 layers | ||
Gas system
| Flow range | 0~300SCCM | |
Process gas gas circuit | Standard with two channels, can be customized | ||
制御システム | System control | PLC | |
Delivery method | 7 インチのタッチスクリーン | ||
Other Parameter
| Boundary dimension | 900×1600×900mm(宽×高×深) | |
重さ | 150KG | ||
Device appearance color | silver gray |
Factory specification requirements
Factory specification requirements | |
Ac power specifications | 電源:AC380V,50/60Hz,5 行,50あ |
工場排気 | 流れ:2.0 m3/分 |
Gas requirements for factory work | 流れ:1~10 L/min プレッシャー:3~7 kg/cm2 Pipe diameter:6×4 mm 材料: PUパイプ Purity: その上 99.99% |
Factory compressed air requirements | 流れ:1~10 L/min プレッシャー:3~7 kg/cm2 Pipe diameter:8×5 mm 材料: PUパイプ Dew point: below -40℃ 粒子>0.3μm:10個/ft3 |
Configuration list
configuration list | |||||
いいえ | 名前 | 説明 | ユニット | 数量 | |
1 | ホスト | Boundary dimension:900×1600×900mm(W×H×D) | Pc | 1 | |
2 | Vacuum chamber | Aluminum alloy vacuum chamber Inside dimension375×375×430mm(W×H×D) | Pc | 1 | |
3 | Excitation power supply | Radio-frequency power supply | Medium-frequency power supply | Set | 1 |
頻度:13.56MHz; 力 :0~600W Automatic vacuum capacitor matcher | 頻度:40KHz; 0~1000W;
| ||||
4 | PLC | SIEMENS,S7-200 | Pc | 1 | |
5 | タッチスクリーン | Vellon, 7 inch screen, MT6071iE | Pc | 1 | |
6 | 流量計 | British Wawick brand | Pc | 2 | |
7 | 真空ポンプ | Flyover two-stage rotary vane pump (oil pump) : 40m3/h | Pc | 1 | |
8 | Vacuum gauge | INFICON
| Pc | 1 | |
9 | マニュアル
| Operation manual of vacuum plasma cleaner SPV-60 | Pc | 1 |
Optional table
Optional table | ||
Excitation power supply | Radio-frequency power supply | Medium-frequency power supply |
Custom power: 頻度:13.56MHz; 力:0~1000W; Custom automatic vacuum capacitor matching machine | 頻度:40KHz,力:2000W
| |
CERES power supply: frequency 13.56MHz; 力:0~600W or 0~1000W Optional ; American CERES automatic vacuum capacitor matcher | ||
真空ポンプ | Germany Leibao double-stage rotary vane pump (oil pump):40m3/h | |
Flyover two-stage rotary vane pump (oil pump) :40m3/h |