説明

SPK-500S ワイドプラズマ洗浄機

Outline:

SPK-500S Wide Plasma Cleaning Machine(プラズマクリーナー),the gas is separated into plasma state through the excitation power supply, and the plasma ACTS on the product surface to clean the pollutants on the product surface, so as to improve the surface activity and enhance the adhesion.Plasma cleaning is a new, 環境を守ること, efficient and stable surface treatment.

SPK-500S ワイドプラズマ洗浄機

Product feature:

1.A dielectric is placed between the metal electrodes, and a uniform electric field is formed and a plasma is generated by taking advantage of the polarization phenomenon on the surface of the dielectric.

2.It can form plasma on a large scale and can be used with automatic pipeline;

3.More reliable power amplifier and dc module, using automatic vacuum capacitor matcher to provide long-term stable process time guarantee;

4.Suitable for mass production of large size products;

5.Low treatment temperature, conventional treatment temperature < 40℃.

ndustry application:

1.ディスプレイ産業: TP fitting, panel surface activation, surface cleaning before ITO coating;

2.Glass cover industry: AF coating pretreatment, AF/AS overflow plating removal, インク印刷;

3.Semiconductor: integrated package bonding, Wire bond pretreatment, ceramic packaging, BGA/LED surface activation;

4.Circuit board: FPC/PCB organic cleaning and surface activation;

5.プラスチック産業: surface modification, surface coarsening.

SPK-500S ワイドプラズマ洗浄機

Specification of equipment:

Broad plasma host
Specification of the machineL1800×W1107×H1408mm
重さ280Kg
Requirements planningAC 220V/50Hz single phase 2.5KW
Plasma generator specification
0-600W調整可能
Mains frequency13.56MHz
MatcherFully automatic vacuum capacitor matching unit

 

Plasma gun head specification
Treatment process800んん
槍頭サイズL570*W90*H74mm
重さ10Kg
The gun head is adjustable in height

 

0-10mm(regulation precision ±0.3)
Common processing height

 

From 1 に 5 mm or less

 

Cooling range of gun head

 

25-35℃
Process gas
The use of gasAr with O2 Two way gas
Ar Gas regulation range

 

≤50L/min
O2 Gas regulation range

 

≤50SCCM
Pipeline specification
Pipeline speed0-100 – mm/s is adjustable

 

Feed belt1.5M
The belt materialskid resistance PU
Induction and alarm
Sensing systemCard and lamination induction and emergency stop
Call the policeWith sound and light alarm function

2.2 工場仕様

Installation environment requirements
Demand for power supplyAC 220V/50Hz single phase 2.5KW
Hvac, argon gas

(Ar)

プレッシャー:0.3-0.8メガパスカル

流れ:15-50L/分

純度:99.99%

The equipments of oxygen

(O2)

プレッシャー:0.1-0.5メガパスカル

流れ:0-100mL/分

純度:99.99%

Service clearance100cm

2.3 一般的な要件

一般的な要件
リスクの特定高圧の危険性の特定

 

Service environment温度:15~30℃

湿度:30~70%

Other matters needing attention不燃性ガス, 腐食性ガス, 爆発または反応性粉塵
構成リスト
シリアルナンバー名前Model and specification述べる
1Plasma power0-600W1
2Plasma matching unit

 

matcher1
3Assembly lineLength 1800 んん * 520 mm wide

 

1
4PLCPanasonic PLC1
5Low voltage appliancesConventional electrical appliance

 

1
6流量計Ar And O22
7Cooling-water machine450W,5-35℃1
8Plasma head

 

R5001






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