説明

Small vacuum plasma cleaner,Etcher for electronic products,Vacuum plasma surface treatment machine

Product parameter

商品名Vacuum plasma cleaner
製品モデルGD-10
電源AC220V(±10V)
電源100w-300w
Cavity size (んん)560X550X400mm(WXDXH)
動作周波数40 KHZ and 13.56 MHz (オプション)
空気源圧力2-2.5 kg
重さ100kg
ガスを使用する窒素, 酸素, 窒素, 空気
接続長さ

2m-4m

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Small vacuum plasma cleaner,Etcher for electronic products,Vacuum plasma surface treatment machine
Functional characteristics

製品の表面改質
Fanrui プラズマ装置の改造により、材料の前処理の影響因子を効果的に低減できます。 95%

製品表面の活性化
Fangruiプラズマ装置で前処理された材料の表面活性化率は、 98%

製品表面の洗浄
Fanrui プラズマ装置の改造により、材料の前処理の影響因子を効果的に低減できます。 95%

製品表面の接着
素材表面の密着性を向上させました。 92% Fanruiプラズマ装置を使用して

Application of multiple industries
に適し 95% 業界, strong compatibility
自動車製造業
携帯電話製造業
繊維捺染業
半導体パッケージング産業
Heavy industry
新エネルギー産業
FBC/PCB分野
医療産業

Small vacuum plasma cleaner,Etcher for electronic products,Vacuum plasma surface treatment machine
初め, the advantages of vacuum equiseparation cleaning machine

Compared with traditional processes, plasma surface treatment technology has the following advantages:
[Strong function] : Modification only occurs on the surface of the material (about a few to dozens of nanometers), without changing the inherent properties of the matrix
To give one or more new functions;
[Wide application] : regardless of the substrate type of the treatment object, 金属などの, プラスチック, ガラス, ポリマー材料, 等, can be processed;
[Easy to operate] : simple process, 操作が簡単, strong production control and high stability;
[高効率] : short treatment time, high reaction rate, good treatment uniformity;
[Energy saving, 環境を守ること] : The whole process of dry treatment, no consumption of water resources, no need to add chemical agents, no pollution.
二, 製品導入
RD-10 Vacuum plasma cleaning machine is a vacuum reaction chamber can rotate 360° cleaning machine, widely used in small batch production of enterprises or universities for scientific research. The whole machine is compact, 安定したパフォーマンス, uniform and stable treatment effect, 高いコストパフォーマンス, vacuum reaction chamber can rotate 360°, 360° without dead Angle processing granular products and small irregular products.
1. Equipment composition
Plasma cleaning machine is composed of reaction chamber (also known as vacuum chamber), vacuum system, discharge system, electric control system, intake flow control system.
The reaction chamber consists of a vacuum chamber and an electrode, which is a plasma reaction space. The items to be treated are placed in the reaction chamber. The vacuum system consists of a vacuum gauge, a vacuum pump and a vacuum pipe, which is responsible for purifying the air in the reaction chamber and maintaining an appropriate vacuum degree during operation. The discharge system provides signal and energy for the reaction chamber to stimulate the ionization of the reaction gas in the chamber to form the plasma needed. The function of the electronic control system is to control the operation process of the equipment according to the optimal process parameters and steps, and maintain the stability of the process parameters; The intake flow control system is mainly composed of mass flowmeters and electromagnetic valves. Its function is to accurately control the intake flow of the reaction gas and maintain the vacuum required during the working period.
The device uses a touch screen +PLC programmable controller, processing parameters can be arbitrarily set on the touch screen, with manual/automatic switching function. The automatic operation adoptsone key type”, and the working process is completely controlled by the computer automatically. Manual operation is performed by the user on the manual mode interface.

Small vacuum plasma cleaner,Etcher for electronic products,Vacuum plasma surface treatment machine

numberItem typeSpecific parameter
1プラズマ発生装置

Intermediate frequency 40Khz Intermediate frequency power 100~300W
Equipped with imported touch screen panel control, to meet user requirements

2Plasma reaction control softwareFang Rui technology independently developed proprietary software V1.0

Fully automatic system control

3Vacuum chamberCavity internal size: Φ210*300mm
Chamber material: 304 stainless steel material
4Vacuum reaction chamber

Cavity internal size: Φ160*230mm

Chamber material: 304 stainless steel material

5electrode

Design of cylindrical electrode structure.

Reaction volume: 5L

6真空ポンプ

Bipolar direct rotary vane vacuum pump pumping rate: 14.4m3/H

Limit vacuum: 6*10-2Pa Power: 0.55KW

7

Pipes and components

Vacuum pipe: 304 stainless steel vacuum corrugated pipe

Working gas pipeline components: PVC transparent hose +304 stainless steel connectors to ensure efficient operation and reliability of the equipment.

8Vacuum gaugeJapanese Panasonic digital display table
9Gas control2 way process gas, solenoid valve control, mechanical manual adjustment 0.1 ~ 1NL/min
10Plasma process gasSupport two process gas: アルゴン, 酸素 (アルゴン, 酸素, 窒素, 水素, carbon tetrafluoride optional)
11制御モード4.3 “industrial control touch screen, real-time display of working status
12Vacuuming time30s pressure <50パ
13Vacuum breaking system

Solenoid valve + silencer

Vacuum breaking time: 30s

14

Single processing time

1-30 分 (depending on product characteristics, power and time Settings are different)
15Electrode materialカスタム 304 stainless steel electrodes
16Other parameters

電源: AC220V(±10V)

機械サイズ: W700×D640×H475mm (for reference)

機械重量: 55kg

Machine: Highquality antirust paint

17Motor speed range<10 turns /min

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